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ME128 – Project 2: Parametric Design of a MEMS Accelerometer

Purpose: To determine optimal dimensions for a fully double folded flexure-based MEMS accelerometer, and confirm results using FEA.

Method: An optimization method was devised and performed using MATLAB. Due to constraints, only three dimensions had to be optimized. Stress, displacement, and acceleration resolution was determined for all combinations of dimensions, and acceptable operating regions were determined. Cross-axis shock and natural frequency analyses were also performed.

The entire report (46 pgs) can be downloaded in Word document and Adobe PDF form. (doc) (pdf)




Natural Frequency Response Mode 2 - 2,367 Hz